High-density individually addressable platinum nanoelectrodes for biomedical applications
نویسندگان
چکیده
Abstract 3-D vertical nanoelectrode arrays (NEAs) have found applications in several biomedical and sensing applications, including high-resolution neuronal excitation measurement single-molecule electrochemical biosensing. There been reports on high-density nanoelectrodes recent years, with the filling ratio of electrodes reaching close to 0.002 (assuming electrode diameter 200 nm pitch 4 μm). Still, it is well below nanowire required form interconnected networks, i.e., more than 0.14 1.5 Here, we employ a multi-step, large-area electron beam lithography procedure along targeted, focused ion based metal deposition technique realize an individually addressable, 60-channel chip as high 0.16, which within limit for formation networks. Moreover, designed NEA be compatible commercially available MEA2100-System, can, future, enable readily used obtaining data from individual electrodes. We also perform in-depth impedance spectroscopy characterization show that behavior charge transfer mechanism array are significantly influenced by changing thickness SU-8 planarization layer (i.e., exposed platinum surface). In addition neural signal measurement, propose these chips potential other future such level bio-analyte sensing.
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ژورنال
عنوان ژورنال: Discover materials
سال: 2022
ISSN: ['2730-7727']
DOI: https://doi.org/10.1007/s43939-022-00027-1